Deposition of the a-BCN film formed from tri-methylborazine

Publication Information

Title

Japanese:	Deposition of the a-BCN film formed from tri-methylborazine
English:	Deposition of the a-BCN film formed from tri-methylborazine

Author

Japanese:	河越奈沙, 中野雅之, Tetsuya YAMAMOTO, 稗田純子, 大竹尚登, 赤坂大樹.
English:	Nasa KAWAGOSHI, Masayuki NAKANO, Tetsuya YAMAMOTO, Junko HIEDA, Naoto OHTAKE, Hiroki AKASAKA.

Language

English

Journal/Book name

Japanese:	The 16th International Conference on Precision Engineering Abstract book
English:	The 16th International Conference on Precision Engineering Abstract book

Volume, Number, Page

Published date

Nov. 14, 2016

Publisher

Japanese:	精密工学会
English:	JSPE

Conference name

Japanese:	The 16th International Conference on Precision Engineering
English:	The 16th International Conference on Precision Engineering

Conference site

Japanese:	Hamamatsu city, Shizuoka
English: