Enhanced Mechanical Strength of Ti-Au Bi-Layered Micro-Cantilever for MEMS Accelerometers

Publication Information

Title

Japanese:
English:	Enhanced Mechanical Strength of Ti-Au Bi-Layered Micro-Cantilever for MEMS Accelerometers

Author

Japanese:	Hashigata Ken, TangHao-Chun, 陳君怡, Chang Tso-Fu Mark, 山根大輔, 小西敏文, 町田克之, 益一哉, 曽根正人.
English:	Ken Hashigata, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 17, 2018

Publisher

Japanese:
English:

Conference name

Japanese:	第64回応用物理学会春季学術講演会
English:

Conference site

Japanese:	東京都
English: