犠牲層を用いないSU-8構造体の剥離方法の提案

Publication Information

Title

Japanese:	犠牲層を用いないSU-8構造体の剥離方法の提案
English:	Proposal of peeling method of SU-8 structures without using any sacrificial layer

Author

Japanese:	Mao Zebing, 吉田和弘, 金俊完.
English:	Zebing MAO, Kazuhiro Yoshida, Joon-wan kim.

Language

Japanese

Journal/Book name

Japanese:	第18回機素潤滑設計部門講演会講演論文集
English:

Volume, Number, Page

No. 18-6 pp. 183-184

Published date

Apr. 22, 2018

Publisher

Japanese:	一般社団法人日本機械学会
English:

Conference name

Japanese:	第18回機素潤滑設計部門講演会
English:	The 18th. Machine Design and Tribology Division Meetin in JSME

Conference site

Japanese:	山形県
English:

Official URL