Localized pours silicon sructure by patterned illumination using shadowmasks

Publication Information

Title

Japanese:
English:	Localized pours silicon sructure by patterned illumination using shadowmasks

Author

Japanese:	朴鍾淏, Beomjoon Kim, 栁田保子, 初澤毅.
English:	Jongho Park, Beomjoon Kim, Yasuko YANAGIDA, TAKESHI HATSUZAWA.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

p. 132

Published date

Nov. 9, 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2nd International Symposium on Biochemical Engineering

Conference site

Japanese:	東京
English: