PHOTOLUMINESCENCE ASSESSMENT OF B, P, AND AL IN SI WAFERS - THE PROBLEM OF SAMPLE HEATING BY A LASER-BEAM

Publication Information

Title

Japanese:	PHOTOLUMINESCENCE ASSESSMENT OF B, P, AND AL IN SI WAFERS - THE PROBLEM OF SAMPLE HEATING BY A LASER-BEAM
English:	PHOTOLUMINESCENCE ASSESSMENT OF B, P, AND AL IN SI WAFERS - THE PROBLEM OF SAMPLE HEATING BY A LASER-BEAM

Author

Japanese:	Pelant, I., VACHAMARTIN.
English:	Pelant, I., Martin Vacha.

Language

English

Journal/Book name

Japanese:	Journal of Applied Physics
English:	Journal of Applied Physics

Volume, Number, Page

Vol. 73 No. 7 pp. 3477-3481

Published date

1993

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI