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Publication Information
Title
Japanese:
PHOTOLUMINESCENCE ASSESSMENT OF B, P, AND AL IN SI WAFERS - THE PROBLEM OF SAMPLE HEATING BY A LASER-BEAM
English:
PHOTOLUMINESCENCE ASSESSMENT OF B, P, AND AL IN SI WAFERS - THE PROBLEM OF SAMPLE HEATING BY A LASER-BEAM
Author
Japanese:
Pelant, I.,
VACHAMARTIN
.
English:
Pelant, I.,
Martin Vacha
.
Language
English
Journal/Book name
Japanese:
Journal of Applied Physics
English:
Journal of Applied Physics
Volume, Number, Page
Vol. 73 No. 7 pp. 3477-3481
Published date
1993
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
Official URL
http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:A1993KV03100052&KeyUID=WOS:A1993KV03100052
DOI
https://doi.org/10.1063/1.352952
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Tokyo Institute of Technology All rights reserved.