Effect of substrate type and temperature on the growth of thin Ru films by metal organic chemical vapor deposition

Publication Information

Title

Japanese:
English:	Effect of substrate type and temperature on the growth of thin Ru films by metal organic chemical vapor deposition

Author

Japanese:	千葉洋一, 平野雅輝, 河野和久, Noriaki Oshima, 舟窪浩.
English:	Hirokazu Chiba, Masaki Hirano, Kazuhisa Kawano, Noriaki Oshima, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Materials Science in Semiconductor Processing

Volume, Number, Page

vol. 70 pp. 73–77

Published date

Nov. 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: