In-plane orientation and composition dependences of crystal structure and electrical properties of {100}-oriented Pb(Zr, Ti)O3 films grown on (100) Si substrates by metal organic chemical vapor deposition

Publication Information

Title

Japanese:
English:	In-plane orientation and composition dependences of crystal structure and electrical properties of {100}-oriented Pb(Zr, Ti)O3 films grown on (100) Si substrates by metal organic chemical vapor deposition

Author

Japanese:	岡本庄司, P. S. Sankara Rama Krishnan, Satoshi Okamoto, 横山信太郎, 秋山賢輔, 舟窪浩.
English:	Shoji Okamoto, P. S. Sankara Rama Krishnan, Satoshi Okamoto, Shintaro Yokoyama, Kensuke Akiyama, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Jpn. J. Appl. Phys.

Volume, Number, Page

vol. 56 pp. 10PF12-1-5

Published date

Sept. 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: