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Publication Information
Title
Japanese:
English:
Reliability Characteristics of Ti/Au Micro-Cantilever by Long-Term Vibration Test
Author
Japanese:
橘 航一朗
,
陳 君怡
,
Chang Tso-Fu Mark
,
新田 京太朗
,
山根 大輔
,
小西 敏文
,
町田 克之
,
伊藤 浩之
,
益 一哉
,
曽根 正人
.
English:
Koichiro Tachibana
,
Chun-Yi Chen
,
Tso-Fu Mark Chang
,
Kyotaro Nitta
,
Daisuke Yamane
,
Toshifumi Konishi
,
Katsuyuki Machida
,
Hiroyuki Ito
,
Kazuya Masu
,
Masato Sone
.
Language
English
Journal/Book name
Japanese:
English:
44rd International Conference on Micro & Nano Engineering (MNE2018)
Volume, Number, Page
Published date
Sept. 24, 2018
Publisher
Japanese:
English:
Conference name
Japanese:
English:
44rd International Conference on Micro & Nano Engineering (MNE2018)
Conference site
Japanese:
Copenhagen
English:
©2007
Institute of Science Tokyo All rights reserved.