Young’s Modulus of Ti/Au Micro-Cantilever by Resonance Frequency Method toward Au-Based MEMS Device

Publication Information

Title

Japanese:
English:	Young’s Modulus of Ti/Au Micro-Cantilever by Resonance Frequency Method toward Au-Based MEMS Device

Author

Language

English

Journal/Book name

Japanese:
English:	44rd International Conference on Micro & Nano Engineering (MNE2018)

Volume, Number, Page

Published date

Sept. 24, 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	44rd International Conference on Micro & Nano Engineering (MNE2018)

Conference site

Japanese:	Copenhagen
English: