Micro-Mechanical Properties of Defect-Free Nickel Electrodeposited at a High Growth Rate toward MEMS Devices

Publication Information

Title

Japanese:
English:	Micro-Mechanical Properties of Defect-Free Nickel Electrodeposited at a High Growth Rate toward MEMS Devices

Author

Japanese:	山本貴大, 井川健吾, 陳君怡, Chang Tso-Fu Mark, 名越貴志, 工藤緯, 前田龍, 曽根正人.
English:	Takahiro Yamamoto, Kengo Igawa, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Osamu Kudo, Ryu Maeda, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:	44rd International Conference on Micro & Nano Engineering (MNE2018)

Volume, Number, Page

Published date

Sept. 24, 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	44rd International Conference on Micro & Nano Engineering (MNE2018)

Conference site

Japanese:	Copenhagen
English: