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Title
Japanese: 
English:Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors 
Author
Japanese: Chang Tso-Fu Mark, 陳 君怡, 石塚 陽大, 寺西 美波, 鈴木 拓真, 山根 大輔, 小西 敏文, 町田 克之, 益 一哉, 曽根 正人.  
English: Tso-Fu Mark Chang, Chun-Yi Chen, Yota Ishizuka, Minami Teranishi, Takuma Suzuki, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone.  
Language English 
Journal/Book name
Japanese: 
English:Advances in Microelectronics Reviews 
Volume, Number, Page Vol. 2        pp. 23-48
Published date Feb. 7, 2019 
Publisher
Japanese: 
English:IFSA Publishing 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
Official URL https://www.sensorsportal.com/DOWNLOADS/Books/9788409081592.pdf
 

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