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Publication Information
Title
Japanese:
English:
Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors
Author
Japanese:
Chang Tso-Fu Mark
,
陳 君怡
,
石塚 陽大
,
寺西 美波
,
鈴木 拓真
,
山根 大輔
,
小西 敏文
,
町田 克之
,
益 一哉
,
曽根 正人
.
English:
Tso-Fu Mark Chang
,
Chun-Yi Chen
,
Yota Ishizuka
,
Minami Teranishi
,
Takuma Suzuki
,
Daisuke Yamane
,
Toshifumi Konishi
,
Katsuyuki Machida
,
Kazuya Masu
,
Masato Sone
.
Language
English
Journal/Book name
Japanese:
English:
Advances in Microelectronics Reviews
Volume, Number, Page
Vol. 2 pp. 23-48
Published date
Feb. 7, 2019
Publisher
Japanese:
English:
IFSA Publishing
Conference name
Japanese:
English:
Conference site
Japanese:
English:
Official URL
https://www.sensorsportal.com/DOWNLOADS/Books/9788409081592.pdf
©2007
Tokyo Institute of Technology All rights reserved.