High-Resolution MEMS Accelerometer by Multi-Layer Metal Technology

Publication Information

Title

Japanese:
English:	High-Resolution MEMS Accelerometer by Multi-Layer Metal Technology

Author

Japanese:	山根大輔, 町田克之, 伊藤浩之, 益一哉.
English:	Daisuke Yamane, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 3, 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Taiwan-Japan-US Joint Workshop on Energy Materials and Sustainable Development

Conference site

Japanese:
English:	Hsinchu