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Publication Information
Title
Japanese:
English:
High-Resolution MEMS Accelerometer by Multi-Layer Metal Technology
Author
Japanese:
山根 大輔
,
町田 克之
,
伊藤 浩之
,
益 一哉
.
English:
Daisuke Yamane
,
Katsuyuki Machida
,
Hiroyuki Ito
,
Kazuya Masu
.
Language
English
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Sept. 3, 2018
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Taiwan-Japan-US Joint Workshop on Energy Materials and Sustainable Development
Conference site
Japanese:
English:
Hsinchu
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Tokyo Institute of Technology All rights reserved.