Thickness-dependent phase stability of epitaxial ferroelectric HfO2-based films

Publication Information

Title

Japanese:
English:	Thickness-dependent phase stability of epitaxial ferroelectric HfO2-based films

Author

Japanese:	三村和仙, 片山きりは, 清水荘雄, 木口賢紀, Akihiro Akama, Toyohiko J. Konno, 坂田修身, 舟窪浩.
English:	Takanori Mimura, Kiriha Katayama, Takao Shimizu, Takanori Kiguchi, Akihiro Akama, Toyohiko J. Konno, Osami Sakata, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Aug. 1, 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	STAC-10 (The Tenth International Conference on the Science and Technology for Advanced Ceramics)

Conference site

Japanese:
English:	Yokohama