固相エピタキシー法による強誘電体HfO2基薄膜の作製

Publication Information

Title

Japanese:	固相エピタキシー法による強誘電体HfO2基薄膜の作製
English:

Author

Japanese:	白石貴久, Choi Sujin, 清水荘雄, 舟窪浩, 木口賢紀, 今野豊彦.
English:	Takahisa Shiraishi, Choi Sujin, Takao Shimizu, HIROSHI FUNAKUBO, Takanori Kiguchi, Toyohiko Konno.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 5, 2017

Publisher

Japanese:
English:

Conference name

Japanese:	第78回応用物理学会秋季学術講演会
English:

Conference site

Japanese:	福岡市
English: