紫外エキシマ光／レーザー照射によるβ-Ga<sub>2</sub>O<sub>3</sub>薄膜の室温固相結晶化プロセスの検討

Publication Information

Title

Japanese:	紫外エキシマ光／レーザー照射によるβ-Ga₂O₃薄膜の室温固相結晶化プロセスの検討
English:	Investigation of room temperature solid-phase crystallization process of β-Ga₂O₃ thin film by ultraviolet excimer lamp / laser irradiation

Author

Japanese:	大賀友瑛, 森田公之, 池谷侑紀, 土嶺信男, 金子智, 松田晃史, 吉本護.
English:	Tomoaki Oga, Hiroyuki Morita, Yuki Ikeya, Nobuo Tsuchimine, Satoru Kaneko, Akifumi Matsuda, MAMORU YOSHIMOTO.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 5, 2018

Publisher

Japanese:
English:

Conference name

Japanese:	2018年第79回応用物理学会秋季学術講演会
English:	The 79th JSAP Autumn Meeting, 2018

Conference site

Japanese:	名古屋
English:	Nagoya

Official URL