周期的ナノパターン表面を有するポリマー基板上への酸化物半導体薄膜の作製と電気特性評価

Publication Information

Title

Japanese:	周期的ナノパターン表面を有するポリマー基板上への酸化物半導体薄膜の作製と電気特性評価
English:	Preparation of oxide thin film on periodic nanostructured polymer substrates

Author

Japanese:	岩佐健, 大賀友瑛, 土嶺信男, 金子智, 松田晃史, 吉本護.
English:	Ken Iwasa, Tomoaki Oga, Nobuo Tsuchimine, Satoru Kaneko, Akifumi Matsuda, MAMORU YOSHIMOTO.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 5, 2018

Publisher

Japanese:
English:

Conference name

Japanese:	2018年第79回応用物理学会秋季学術講演会
English:	The 79th JSAP Autumn Meeting, 2018

Conference site

Japanese:	名古屋
English:	Nagoya

Official URL