Nanoscale Surface Patterning of α-Al<sub>2</sub>O<sub>3</sub> Substrates by Way of Room-temperature Homoepitaxial Growth for Development of High-performance Devices

Publication Information

Title

Japanese:
English:	Nanoscale Surface Patterning of α-Al₂O₃ Substrates by Way of Room-temperature Homoepitaxial Growth for Development of High-performance Devices

Author

Japanese:	塩尻大士, 吉田彬, 井上直哉, 金子智, 松田晃史, 吉本護.
English:	daishi shiojiri, Akira Yoshida, Naoya Inoue, Satoru Kaneko, Akifumi Matsuda, MAMORU YOSHIMOTO.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Apr. 1, 2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2013 MRS Spring Meeting & Exhibit

Conference site

Japanese:
English:	San Francisco

Official URL