非晶質材料表面への天然素材を使ったナノインプリントパターニング

Publication Information

Title

Japanese:	非晶質材料表面への天然素材を使ったナノインプリントパターニング
English:	Nanopatterning using natural material to amorphous substance materials surface by nanoimprint lithography

Author

Japanese:	井上直哉, 譚ゴオン, 大井秀雄, 三田正弘, 奥田徳路, 松田晃史, 吉本護.
English:	Naoya Inoue, Geng Tan, Hideo Oi, Masahiro Mita, Norimichi Okuda, Akifumi Matsuda, MAMORU YOSHIMOTO.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 27, 2013

Publisher

Japanese:
English:

Conference name

Japanese:	2013年第60回応用物理学会春季学術講演会
English:	The 60th JSAP Spring Meeting, 2013

Conference site

Japanese:	厚木
English:	Atsugi

Official URL