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Publication Information
Title
Japanese:
English:
Numerical modeling method to reproduce UV imprint process using thermo-viscoelastic constitutive law
Author
Japanese:
山下 龍之介
,
大西 有希
,
天谷 賢治
.
English:
Ryunosuke YAMASHITA
,
Yuki ONISHI
,
Kenji AMAYA
.
Language
English
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Sept. 25, 2018
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Micro & Nano Engineering Conference (MNE2018)
Conference site
Japanese:
English:
Copenhagen
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Tokyo Institute of Technology All rights reserved.