Numerical modeling method to reproduce UV imprint process using thermo-viscoelastic constitutive law

Publication Information

Title

Japanese:
English:	Numerical modeling method to reproduce UV imprint process using thermo-viscoelastic constitutive law

Author

Japanese:	山下龍之介, 大西有希, 天谷賢治.
English:	Ryunosuke YAMASHITA, Yuki ONISHI, Kenji AMAYA.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 25, 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Micro & Nano Engineering Conference (MNE2018)

Conference site

Japanese:
English:	Copenhagen