In-situ bias current monitoring of nucleation for epitaxial diamonds on 3C-SiC/Si substrates

Publication Information

Title

Japanese:
English:	In-situ bias current monitoring of nucleation for epitaxial diamonds on 3C-SiC/Si substrates

Author

Japanese:	矢板潤也, 須藤建瑠, M. Natal, S. E. Saddow, 波多野睦子, 岩崎孝之.
English:	J. Yaita, T.Suto, M. Natal, S. E. Saddow, M. Hatano, T. Iwasaki.

Language

English

Journal/Book name

Japanese:
English:	Diamond & Related Materials

Volume, Number, Page

Vol. 88 pp. 158-162

Published date

Sept. 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI