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Title
Japanese:高プラズマパワー密度CVDとArガスによる高配向・高 生成効率NVアンサンブルの高速合成 
English: 
Author
Japanese: 辻 赳行, 小澤 勇斗, 岩崎 孝之, 波多野 睦子.  
English: Takeyuki Tsuji, Hayato Ozawa, Takayuki Iwasaki, Mutsuko Hatano.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Sept. 21, 2018 
Publisher
Japanese: 
English: 
Conference name
Japanese:第79回応用物理学会秋季学術講演会 
English: 
Conference site
Japanese:愛知、名古屋 
English: 

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