Fast bonding technology by using partially-crosslinked SU-8 for MEMS-fabricated actuators and sensors

Publication Information

Title

Japanese:
English:	Fast bonding technology by using partially-crosslinked SU-8 for MEMS-fabricated actuators and sensors

Author

Japanese:	Mao Zebing, 吉田和弘, 金俊完.
English:	Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim.

Language

English

Journal/Book name

Japanese:
English:	International Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA2018)

Volume, Number, Page

p. 54

Published date

Sept. 11, 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	International Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA2018)

Conference site

Japanese:	神戸
English:

Official URL