Gas Species Comparison of Fast Atom Beam Irradiation to Photoluminescence Properties of GaInAs/InP layers for Surface Activated Bonding

Publication Information

Title

Japanese:
English:	Gas Species Comparison of Fast Atom Beam Irradiation to Photoluminescence Properties of GaInAs/InP layers for Surface Activated Bonding

Author

Japanese:	王雨寧, 御手洗拓矢, 雨宮智宏, 西山伸彦, 荒井滋久.
English:	Yuning Wang, Takuya Mitarai, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai.

Language

English

Journal/Book name

Japanese:	第79回応用物理学会秋季学術講演会講演予稿集
English:	Extended abstracts of the 79th JSAP autumn meeting

Volume, Number, Page

Published date

Sept. 18, 2018

Publisher

Japanese:	公益社団法人応用物理学会
English:	The Japan Society of Applied Physics

Conference name

Japanese:	2018年第79回応用物理学会秋季学術講演会
English:	The 79th JSAP Autumn Meeting,2018

Conference site

Japanese:	名古屋
English:	Nagoya

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