Generation of 13.5 nm Extreme Ultraviolet light (EUV); a materials perspective

Publication Information

Title

Japanese:
English:	Generation of 13.5 nm Extreme Ultraviolet light (EUV); a materials perspective

Author

Japanese:	Musgrave Christopher, 庄司俊太郎, Lu Nan, 長井圭治.
English:	Christopher Musgrave, Shuntaro Shoji, Nan Lu, Keiji Nagai.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 3, 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	International CLS Forum on "Photo and Catalytic Science for Sustainable Society

Conference site

Japanese:
English: