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Publication Information
Title
Japanese:
English:
Steps towards compact generation of 13.5 nm Extreme ultraviolet (EUV) light
Author
Japanese:
Musgrave Christopher
,
村上 勇仁
,
佐藤 理絵
,
庄司 俊太郎
,
長谷川 香織
,
Lu Nan
,
彌田 智一
,
長井 圭治
.
English:
Christopher S A Musgrave
,
Takehito Murakami
,
Rie Sato
,
Shuntaro Shoji
,
Kaori Hasegawa
,
Nan Lu
,
Tomokazu Iyoda
,
Keiji Nagai
.
Language
English
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
July 6, 2017
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Plasma Physics by Laser and Applications (PPLA 2017)
Conference site
Japanese:
English:
Messina
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Tokyo Institute of Technology All rights reserved.