Steps towards compact generation of 13.5 nm Extreme ultraviolet (EUV) light

Publication Information

Title

Japanese:
English:	Steps towards compact generation of 13.5 nm Extreme ultraviolet (EUV) light

Author

Japanese:	Musgrave Christopher, 村上勇仁, 佐藤理絵, 庄司俊太郎, 長谷川香織, Lu Nan, 彌田智一, 長井圭治.
English:	Christopher S A Musgrave, Takehito Murakami, Rie Sato, Shuntaro Shoji, Kaori Hasegawa, Nan Lu, Tomokazu Iyoda, Keiji Nagai.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

July 6, 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Plasma Physics by Laser and Applications (PPLA 2017)

Conference site

Japanese:
English:	Messina