Imaging plate analysis of Extreme Ultraviolet Light (EUV) from laser-produced plasmas

Publication Information

Title

Japanese:
English:	Imaging plate analysis of Extreme Ultraviolet Light (EUV) from laser-produced plasmas

Author

Japanese:	Musgrave Christopher, 村上勇仁, 彌田智一, 長井圭治.
English:	Christopher S A Musgrave, Takehito Murakami, Tomokazu Iyoda, Keiji Naga.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Feb. 23, 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	SPIE Advanced Lithography 2016

Conference site

Japanese:
English:	San Jose