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Publication Information
Title
Japanese:
1軸MEMS加速度センサのAu錘厚膜化による高性能化の検討
English:
Author
Japanese:
古賀 達也
,
山根 大輔
,
小西 敏文
,
佐布 晃昭
,
飯田 慎一
,
伊藤 浩之
,
石原 昇
,
町田 克之
,
益 一哉
.
English:
Sayaka Koga
,
Daisuke Yamane
,
Toshifumi Konishi
,
Teruaki Safu
,
Shinichi Iida
,
Hiroyuki Ito
,
Noboru Ishihara
,
Katsuyuki Machida
,
Kazuya Masu
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Oct. 30, 2018
Publisher
Japanese:
English:
Conference name
Japanese:
第35回「センサ・マイクロマシンと応用システム」シンポジウム(センサ・マイクロマシン部門大会)
English:
Conference site
Japanese:
北海道
English:
Official URL
http://www.sensorsymposium.org/index_j.html
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Tokyo Institute of Technology All rights reserved.