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Title
Japanese:高圧力非平衡プラズマ中電子密度・温度算出のための発光スペクトル解析 
English:Optical emission spectroscopic (OES) analysis for diagnostics of electron density and temperature in high-pressure non-equilibrium plasmas 
Author
Japanese: 赤塚洋.  
English: HIROSHI AKATSUKA.  
Language Japanese 
Journal/Book name
Japanese:応用物理 
English:OYO BUTURI 
Volume, Number, Page Vol. 87    No. 11    pp. 821 - 827
Published date Nov. 5, 2018 
Publisher
Japanese:公益社団法人 応用物理学会 
English:The Japan Society of Applied Physics 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
Official URL https://www.jstage.jst.go.jp/article/oubutsu/87/11/87_821/_article/-char/ja
 
DOI https://doi.org/10.11470/oubutsu.87.11_821
Abstract We describe the principles and applications of two essential methods for measurement of electron temperature and the density of non-equilibrium plasmas including atmospheric-pressure discharge, based on optical emission spectroscopic (OES) measurement, i.e., line intensity measurement assisted with a collisional radiative model, and continuum spectrum measurement as electron-neutral bremsstrahlung. For the former scheme, we introduce three practical procedures to interpret the OES results based on the excitation kinetic model, which are the “selection of the dominant elementary processes”, the “measurement of two pairs of line intensities”, and the “conversion of the excitation temperature to the electron temperature”. In the last part, examples are shown for the demonstration of the continuum measurement, which has the potential to deduce the electron energy distribution function, followed by its future prospects.

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