Fabrication and Characterization of Perovskite Oxynitride Dielectrics

Publication Information

Title

Japanese:
English:	Fabrication and Characterization of Perovskite Oxynitride Dielectrics

Author

Japanese:	保科拓也, 佐橋明, 金原一樹, 武田博明, 鶴見敬章.
English:	Takuya Hoshina, Akira Sahashi, Kazuki Kanehara, Hiroaki Takeda, Takaaki Tsurumi.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

May 9, 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2017 Joint IEEE ISAF-IWATMD-PFM Conference

Conference site

Japanese:
English:	Atlanta