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Publication Information
Title
Japanese:
English:
A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes
Author
Japanese:
乙部 翔太
,
古賀 達也
,
渥美 賢
,
山根 大輔
,
小西 敏文
,
佐布 晃昭
,
飯田 慎一
,
伊藤 浩之
,
石原 昇
,
町田 克之
,
益 一哉
.
English:
Shota Otobe
,
Tatsuya Koga
,
Ken Atsumi
,
Daisuke Yamane
,
Toshifumi Konishi
,
Teruaki Safu
,
Shin-ichi Iida
,
Hiroyuki. Ito
,
Noboru Ishihara
,
Katsuyuki Machida
,
Kazuya Masu
.
Language
English
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Nov. 13, 2018
Publisher
Japanese:
English:
Conference name
Japanese:
English:
31st International Microprocesses and Nanotechnology Conference (MNC2018)
Conference site
Japanese:
English:
Sapporo
©2007
Institute of Science Tokyo All rights reserved.