Matrix and element dependences of useful yield in Si and SiO2 matrices using laser-ionization sputtered neutral mass spectrometry

Publication Information

Title

Japanese:
English:	Matrix and element dependences of useful yield in Si and SiO2 matrices using laser-ionization sputtered neutral mass spectrometry

Author

Japanese:	Reiko Saito, 圷晴子, Jun Asakawa, Shiro Takeno, Kei Kiyokawa, Satoru Nagashima, Takeharu Ishikawa, Takahiro Kashiwagi, Akio Takano, Tetsuo Sakamoto, 藤井正明.
English:	Reiko Saito, * Haruko Akutsu, Jun Asakawa, Shiro Takeno, Kei Kiyokawa, Satoru Nagashima, Takeharu Ishikawa, Takahiro Kashiwagi, Akio Takano, Tetsuo Sakamoto, Masaaki Fujii.

Language

English

Journal/Book name

Japanese:
English:	Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Volume, Number, Page

36 3 03F128

Published date

May 1, 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: