Research on the Protrusion Problem in the Bonding Process of Free-standing SU-8 Microstructure

Publication Information

Title

Japanese:
English:	Research on the Protrusion Problem in the Bonding Process of Free-standing SU-8 Microstructure

Author

Japanese:	Mao Zebing, 吉田和弘, 金俊完.
English:	Zebing Mao, Kazuhiro Yoshida, Joon-wan KIM.

Language

English

Journal/Book name

Japanese:
English:	International Symposium on Precision Engineering and Sustainable Manufacturing (PRESM2018) Program&Proceedings

Volume, Number, Page

p. OP010

Published date

July 3, 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	International Symposium on Precision Engineering and Sustainable Manufacturing(PRESM2018)

Conference site

Japanese:	札幌市
English:	Sapporo

Official URL