衝突輻射モデルに基づく発光分光計測による低気圧マイクロ波放電Arプラズマの電子温度診断

Publication Information

Title

Japanese:	衝突輻射モデルに基づく発光分光計測による低気圧マイクロ波放電Arプラズマの電子温度診断
English:	Diagnostic of Electron Temperature of Low - pressure Microwave Discharge Ar Plasma by Opt ical Emission Spectroscopy Based on Collisional Radiative Model

Author

Japanese:	山崎文徳, 根津篤, 赤塚洋.
English:	Fuminori Yamazaki, Atsushi Nezu, HIroshi Akatsuka.

Language

Japanese

Journal/Book name

Japanese:	第35回プラズマ・核融合学会年会予稿集
English:	Extenden Abstracts of The 35th annual meeting of Japan Society of Plasma Science and Nuclear Fusion Research

Volume, Number, Page

Published date

Dec. 3, 2018

Publisher

Japanese:	一般社団法人プラズマ・核融合学会
English:	Japan Society of Plasma Science and Nuclear Fusion Research

Conference name

Japanese:	第35回プラズマ・核融合学会年会
English:	The 35th annual meeting of Japan Society of Plasma Science and Nuclear Fusion Research

Conference site

Japanese:	大阪
English:	Osaka

Official URL