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Publication Information
Title
Japanese:
English:
Temperature Dependence on Package Sealing Ambient of MEMS Sensor Fabricated by Gold Electroplating
Author
Japanese:
小西敏文
,
山根大輔
,
佐布晃昭
,
陳君怡
,
Tso-Fu Mark Chang
,
伊藤浩之
,
道正志郎
,
石原昇
,
曽根正人
,
町田克之
,
益一哉
,
飯田慎一
.
English:
Toshifumi Konishi
,
Daisuke Yamane
,
Teruaki Safu
,
Chun Yi Chen
,
Tso-Fu Mark Chang
,
Hiroyuki Ito
,
Shiro Dosho
,
Noboru Ishihara
,
Masato Sone
,
Katsuyuki Machida
,
Kazuya Masu
,
Shinichi Iida
.
Language
English
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Nov. 6, 2017
Publisher
Japanese:
English:
Conference name
Japanese:
English:
The 30th International Microprocesses and Nanotechnology Conference
Conference site
Japanese:
Jeju
English:
©2007
Tokyo Institute of Technology All rights reserved.