A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes

Publication Information

Title

Japanese:
English:	A Novel Tri-Axis MEMS Accelerometer with a Single Au Proof Mass and Fully Differential Sensing Electrodes

Author

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 6, 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 30th International Microprocesses and Nanotechnology Conference

Conference site

Japanese:
English:	Jeju