Effects of deposition condition of a-BCN:H films from tri-methyl-borazine on true densities

Publication Information

Title

Japanese:
English:	Effects of deposition condition of a-BCN:H films from tri-methyl-borazine on true densities

Author

Japanese:	松原沙彩, Tetsuya Yamamoto, 平田祐樹, 大竹尚登, 赤坂大樹.
English:	Saaya Matsubara, Tetsuya Yamamoto, Yuki Hirata, Naoto Ohtake, Hiroki Akasaka.

Language

English

Journal/Book name

Japanese:
English:	Program of The 5th Asian Symposium on Materials and Processing(ASMP2018)

Volume, Number, Page

Published date

Dec. 7, 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 5th Asian Symposium on Materials and Processing(ASMP2018)

Conference site

Japanese:
English:	Bangkok