Design and performance of pi-type thin-film nano-teg using vacuum/sio2-hybrid insulation module structure

Publication Information

Title

Japanese:
English:	Design and performance of pi-type thin-film nano-teg using vacuum/sio2-hybrid insulation module structure

Author

Japanese:	清野稔仁, 千脇那菜, 山下涼音, 菅原聡.
English:	T. Seino, N. Chiwaki, S. Yamashita, S. Sugahara.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 18, 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	IEEE Electron Devices Technology and Manufacturing Conference 2018 (EDTM2018)

Conference site

Japanese:
English:	Kobe