Long-Term Structure Stability of Ti/Au Layered Micro-Cantilever Evaluated by Vibration Test

Publication Information

Title

Japanese:
English:	Long-Term Structure Stability of Ti/Au Layered Micro-Cantilever Evaluated by Vibration Test

Author

Japanese:	橘航一朗, Chang Tso-Fu Mark, 陳君怡, 山根大輔, 小西敏文, 伊藤浩之, 町田克之, 益一哉, 曽根正人.
English:	Koichiro Tachibana, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:	Microelectronic Engineering

Volume, Number, Page

Volume 207 pp. 33-36

Published date

Jan. 28, 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI