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Title
Japanese:大気圧非平衡プラズマの電子エネルギー分布関数の発光分光法による測定の可能性 
English:Possibility of OES Measurement of Electron Energy Distribution Function of Atmospheric-Pressure Non-Equilibrium Plasma 
Author
Japanese: 赤塚 洋, 大西 広, ヴァン•デル•ハーク タイス, 根津 篤.  
English: Hiroshi Akatsuka, Hiroshi Onishi, Thijs van der Gaag, Atsushi Nezu.  
Language Japanese 
Journal/Book name
Japanese:第36 回 プラズマプロセシング研究会／ 第31 回 プラズマ材料科学シンポジウム プロシーディングス 
English:Proceedings of 36th Symposium on Plasma Processing (SPP36) / The 31th Symposium on Plasma Science for Materials (SPSM31) 
Volume, Number, Page         pp. 64-65
Published date Jan. 15, 2019 
Publisher
Japanese:SPP36/SPSM31実行委員会 
English:Executive Committee of SPP36/SPSM31 
Conference name
Japanese:第36 回 プラズマプロセシング研究会／ 第31 回 プラズマ材料科学シンポジウム 
English:36th Symposium on Plasma Processing (SPP36) / The 31th Symposium on Plasma Science for Materials (SPSM31) 
Conference site
Japanese:高知 
English:Kochi 
Official URL http://annex.jsap.or.jp/plasma/PE_files/SPP36/SPP36SPSM31_program1225_OralPoster.pdf
 
Abstract Possibility of measurement of electron energy distribution function (EEDF) of atmospheric-pressure nonequilibrium plasma is discussed. The continuum spectrum from the plasma due to bremsstrahlung of electrons against neutral particles is formulated on its wavelength dependence. As a case study, the continuum emission spectra are shown for Maxwellian EEDF and for Druyvesteynian EEDF. After that, as a reversal problem, the possibility to determine the EEDF is formulated by applying the continuum spectrum emitted from the atmospheric-pressure non-equilibrium plasmas. It is shown that the EEDF is found as a solution to a Volterra integral equation of the first kind for the emission spectrum observed experimentally.

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