EVALUATION OF STRUCTURAL AND MECHANICAL PROPERTIES OF 3-DIMENSIONALY COATED a-C:H FILMS

Publication Information

Title

Japanese:
English:	EVALUATION OF STRUCTURAL AND MECHANICAL PROPERTIES OF 3-DIMENSIONALY COATED a-C:H FILMS

Author

Japanese:	平田祐樹, Takumi Ishikawa, 崔埈豪.
English:	Yuki Hirata, Takumi Ishikawa, Junho Choi.

Language

English

Journal/Book name

Japanese:
English:	Program of The 5th Asian Symposium on Materials and Processing(ASMP2018)

Volume, Number, Page

Published date

Dec. 7, 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 5th Asian Symposium on Materials and Processing(ASMP2018)

Conference site

Japanese:
English:	Bangkok