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Publication Information
Title
Japanese:
English:
Fast packaging by a partially-crosslinked SU-8 adhesive tape for microfluidic sensors and actuators
Author
Japanese:
Mao Zebing
,
吉田 和弘
,
金 俊完
.
English:
Zebing Mao
,
Kazuhiro Yoshida
,
Joon-wan Kim
.
Language
English
Journal/Book name
Japanese:
English:
Sensors and Actuators A: Physical
Volume, Number, Page
Volume 289 15 Page 77-86
Published date
Feb. 18, 2019
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
DOI
https://doi.org/10.1016/j.sna.2019.02.020
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Tokyo Institute of Technology All rights reserved.