Fast packaging by a partially-crosslinked SU-8 adhesive tape for microfluidic sensors and actuators

Publication Information

Title

Japanese:
English:	Fast packaging by a partially-crosslinked SU-8 adhesive tape for microfluidic sensors and actuators

Author

Japanese:	Mao Zebing, 吉田和弘, 金俊完.
English:	Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim.

Language

English

Journal/Book name

Japanese:
English:	Sensors and Actuators A: Physical

Volume, Number, Page

Volume 289 15 Page 77-86

Published date

Feb. 18, 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI