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Title
Japanese:発光分光計測よる大気圧非平衡Arプラズマの電子温度・電子密度の導出と比較 
English:Derivation and Comparison of Electron Temperature and Density of Atmospheric-pressure Non-equilibrium Ar Plasma by Optical Emission Spectroscopy 
Author
Japanese: 大西 広, 根津 篤, 赤塚 洋.  
English: Hiroshi Onishi, Atsushi Nezu, Hiroshi Akatsuka.  
Language Japanese 
Journal/Book name
Japanese:2019年 第66回応用物理学会春季学術講演会 講演予稿集 
English:Extended Abstracts of The 66th JSAP Spring Meeting 2019 
Volume, Number, Page 06-002       
Published date Mar. 1, 2019 
Publisher
Japanese:公益社団法人 応用物理学会 
English:The Japan Society of Applied Physics 
Conference name
Japanese:第66回応用物理学会春季学術講演会 
English:The 66th JSAP Spring Meeting, 2019 
Conference site
Japanese:東京 
English:Tokyo 
Official URL https://confit.atlas.jp/guide/event/jsap2019s/subject/9p-W323-2/entries
 
Abstract Recently, the atmospheric-pressure non-equilibrium plasma is being applied to various fields such as industry, agriculture, medical treatment and so on. However, the measurement methods of the electron temperature and density, which are important parameters on decision of this plasma, are not established. Therefore, the objective of this study is to find these parameters of the atmospheric-pressure non-equilibrium Ar plasma measured by Optical Emission Spectroscopy (OES). In this study, the method to analyze the emission-spectrum such as line spectrum, continuum spectrum, the Stark broadening and number density of excited states are derived with various theories and compared with some discussion.

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