Japanese
Home
Search
Horizontal Search
Publication Search
( Advanced Search )
Patent Search
( Advanced Search )
Research Highlight Search
( Advanced Search )
Researcher Search
Search by Organization
Support
FAQ
T2R2 User Registration
Doctoral thesis registration
Support/Contact
About T2R2
What's T2R2?
Operation Guidance
Leaflets
About file disclosure
Related Links
Science Tokyo
STAR Search
NII IR Program
Home
>
Help
Publication Information
Title
Japanese:
ナノインプリントにおけるレジスト収縮の補正(3D形状補正)
English:
Author
Japanese:
渡辺謙太, 砂川弘樹,
山下龍之介
, 安田雅昭,
大西有希
, 川田博昭, 平井義彦.
English:
渡辺謙太, 砂川弘樹,
Ryunosuke Yamashita
, 安田雅昭,
YUKI ONISHI
, 川田博昭, 平井義彦.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Mar. 9, 2019
Publisher
Japanese:
English:
Conference name
Japanese:
第66回 応用物理学会春季学術講演会
English:
Conference site
Japanese:
東京都
English:
©2007
Institute of Science Tokyo All rights reserved.