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Title
Japanese:ナノインプリントにおけるレジスト収縮の補正(3D形状補正) 
English: 
Author
Japanese: 渡辺謙太, 砂川弘樹, 山下龍之介, 安田雅昭, 大西有希, 川田博昭, 平井義彦.  
English: 渡辺謙太, 砂川弘樹, Ryunosuke Yamashita, 安田雅昭, YUKI ONISHI, 川田博昭, 平井義彦.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Mar. 9, 2019 
Publisher
Japanese: 
English: 
Conference name
Japanese:第66回 応用物理学会春季学術講演会 
English: 
Conference site
Japanese:東京都 
English: 

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