Home >

news Help

Publication Information


Title
Japanese:積層メタル技術によるピラー型容量検出電極の検討 
English: 
Author
Japanese: 渥美 賢, 乙部 翔太, 古賀 達也, 市川 崇志, 山根 大輔, 飯田 慎一, 伊藤 浩之, 石原 昇, 曽根 正人, 町田 克之, 益 一哉.  
English: Ken Atsumi, Shouta Otobe, Sayaka Koga, Takasi Itikawa, Daisuke Yamane, Shinichi Iida, Hiroyuki Ito, Noboru Ishihara, Masato Sone, Katsuyuki Machida, Kazuya Masu.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Mar. 9, 2019 
Publisher
Japanese: 
English: 
Conference name
Japanese:第66回応用物理学会春季学術講演会 
English: 
Conference site
Japanese:東京都 
English: 

©2007 Tokyo Institute of Technology All rights reserved.