Electrodeposition of High-Functional Metal Oxide on Noble Metal for MEMS Devices

Publication Information

Title

Japanese:
English:	Electrodeposition of High-Functional Metal Oxide on Noble Metal for MEMS Devices

Author

Japanese:	Chiu Wan-Ting, 陳君怡, Chang Tso-Fu Mark, Tomoko Hashimoto, Hiromichi Kurosu.
English:	Wan-Ting Chiu, Chun-Yi Chen, Tso-Fu Mark Chang, Tomoko Hashimoto, Hiromichi Kurosu.

Language

English

Journal/Book name

Japanese:
English:	Novel Metal Electrodeposition and the Recent Application

Volume, Number, Page

Published date

Mar. 6, 2019

Publisher

Japanese:
English:	IntechOpen

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI