β-FeSi2 Thin Film Preparation by ECR Plasma-Enhanced MOCVD

Publication Information

Title

Japanese:
English:	β-FeSi2 Thin Film Preparation by ECR Plasma-Enhanced MOCVD

Author

Japanese:	秋山賢輔, Seishiro Ohya, 舟窪浩.
English:	Kensuke Akiyama, Seishiro Ohya, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Trans. Mater. Res. Soc. Jpn.

Volume, Number, Page

Vol. 28 No. 3 pp. 805-808

Published date

2003

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: