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Publication Information
Title
Japanese:
English:
Strengthening of Micro-Cantilever by Au/Ti Bi-Layered Structure Evaluated by Micro-Bending Test toward MEMS Devices
Author
Japanese:
Hashigata Ken
,
TangHao-Chun
,
Chang Tso-Fu Mark
,
陳 君怡
,
山根 大輔
,
小西 敏文
,
伊藤 浩之
,
町田 克之
,
益 一哉
,
曽根 正人
.
English:
Ken Hashigata
,
Hao-Chun Tang
,
Tso-Fu Mark Chang
,
Chun-Yi Chen
,
Daisuke Yamane
,
Toshifumi Konishi
,
Hiroyuki Ito
,
Katsuyuki Machida
,
Kazuya Masu
,
Masato Sone
.
Language
English
Journal/Book name
Japanese:
English:
Microelectronic Engineering
Volume, Number, Page
Vol. 213 pp. 13-17
Published date
May 15, 2019
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
DOI
https://doi.org/10.1016/j.mee.2019.04.008
©2007
Tokyo Institute of Technology All rights reserved.