Releasing large-area SU-8 structures without using any sacrificial layers

Publication Information

Title

Japanese:
English:	Releasing large-area SU-8 structures without using any sacrificial layers

Author

Japanese:	Mao Zebing, 吉田和弘, 金俊完.
English:	Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim.

Language

English

Journal/Book name

Japanese:
English:	Microelectronic Engineering

Volume, Number, Page

Volume 212 pp. 53-60

Published date

Apr. 5, 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI