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Publication Information
Title
Japanese:
English:
Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers
Author
Japanese:
渥美 賢
,
乙部 翔太
,
古賀 達也
, Takashi Ichikawa,
山根 大輔
,
飯田 慎一
,
伊藤 浩之
,
石原 昇
,
曽根 正人
,
町田 克之
,
益 一哉
.
English:
Ken Atsumi
,
Shota Otobe
,
Tatsuya Koga
, Takashi Ichikawa,
Daisuke Yamane
,
Shinichi Iida
,
Hiroyuki Ito
,
Noboru Ishihara
,
Masato Sone
,
Katsuyuki Machida
,
Kazuya Masu
.
Language
English
Journal/Book name
Japanese:
English:
IEEE Conference Paper
Volume, Number, Page
Published date
May 12, 2019
Publisher
Japanese:
English:
IEEE
Conference name
Japanese:
English:
Design, Test, Integration & Packaging of MEMS/MOEMS(DTIP2019)
Conference site
Japanese:
English:
Paris
Official URL
https://ieeexplore.ieee.org/document/8752744
DOI
https://doi.org/10.1109/DTIP.2019.8752744
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Tokyo Institute of Technology All rights reserved.