High Concentration N-Doping into Ga2O3 Films by Using Pulsed-Laser Deposition with NO Plasma

Publication Information

Title

Japanese:
English:	High Concentration N-Doping into Ga2O3 Films by Using Pulsed-Laser Deposition with NO Plasma

Author

Japanese:	李政洙, 若林諒, 斉藤拓海, 吉松公平, Motohisa Kado, 大友明.
English:	Jung-Soo Lee, Ryo Wakabayashi, Takumi Saito, Kohei Yoshimatsu, Motohisa Kado, Akira Ohtomo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

May 21, 2019

Publisher

Japanese:
English:

Conference name

Japanese:
English:	CSW2019

Conference site

Japanese:
English:	Nara